Study of Influencing Factors on Vacuum Evaporation Film Thickness

Lu Chen; Xing Bo Liang; Yang Liu

doi:10.4028/www.scientific.net/AMM.543-547.3716

Paper Titles

Use Case and Functional Requirements of Optical Time Domain Reflectometer
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Nickel Based Coatings Containing TiN Nanoparticles Prepared by Ultrasonic-Electrodeposition Technology
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Characterization of Si–C Covalent Bonding Fabricated between Single Carbon Nanotube and Si Substrate
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Study of Influencing Factors on Vacuum Evaporation Film Thickness
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Effect of TiC Particles on Microstructure and Properties of Al-Fe-V-Si Alloy
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 543-547Study of Influencing Factors on Vacuum Evaporation...

Study of Influencing Factors on Vacuum Evaporation Film Thickness

Abstract:

The basic principle of vacuum evaporation deposition was introduced, the factors that influence the coating thickness in the process of evaporation coating has carried out by theoretical calculation and experimental analysis, and the influence law of film thickness was found out.

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Periodical:

Applied Mechanics and Materials (Volumes 543-547)

Pages:

3716-3720

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.543-547.3716

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Online since:

March 2014

Authors:

Lu Chen*, Xing Bo Liang, Yang Liu

Keywords:

Film Thickness, Mass of Coating Material, Vacuum Vapor Plating

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