Thermal Conductivity of Silicon Thin Films Predicted by Molecular Dynamics Simulations and Theoretical Calculation

Xing Li Zhang; Zhao Wei Sun

doi:10.4028/www.scientific.net/AMM.55-57.1152

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 55-57Thermal Conductivity of Silicon Thin Films...

Thermal Conductivity of Silicon Thin Films Predicted by Molecular Dynamics Simulations and Theoretical Calculation

Abstract:

Molecular, dynamics simulation and the Boltzmann transport equation are used respectively to analyze the phonon transport in Si thin film. The MD result is in good agreement with the theoretical analysis values. The results show that the calculated thermal conductivity decreases almost linearly as the film thickness reduced and is almost independent of the temperature at the nanoscale. It was observed from the simulation results that there exists the obvious size effect on the thermal conductivity.

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Periodical:

Applied Mechanics and Materials (Volumes 55-57)

Pages:

1152-1155

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.55-57.1152

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Online since:

May 2011

Authors:

Xing Li Zhang, Zhao Wei Sun

Keywords:

Molecular Dynamic Simulation, Silicon Thin Film, Thermal Conductivity (TC)

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