Long Guide Straightness Error Measurement Based on Laser Interference

Abstract:

A new kind of straightness error measurement system based on laser interference is developed. High stability He-Ne laser beam which is collimated and broadened is cast on wedge-shaped glass plate, on which back and front the light reflects and interfere. The angle of the guide and target would be changed when the motion of the target is along the guide, if there is linearity error existing in the guide. So interference stripes would be moved by the changed angle of the guide and target. In this way the straightness error of the guide is transferred to the displacement of the interference stripes. Then interference stripes are tested by photoelectricity sensor and deviation of the laser beam is acquired. The comparison tests and repeated tests show that the straightness error is 623.103μm when the tested long guide is 50 meters long.

• Periodical: Applied Mechanics and Materials (Volume 565)
• Pages: 126-132
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.565.126
• Online since: June 2014
• Authors: Chang De Hu*, Yong Qiang Li, Juan Gao, Peng Fu, He Ping Min, Ning Ye
• Keywords: Contrast Experiment, Laser Interference, Long Guide, Straightness Error

References

[1] ZHANG Gangqiang, CHEN Jiangyuan, LUO Songbao. Technology Researcher of Hydrostatic Length Guideway for Precision Measurement Based on Photoelectric Autocollimator[J]. AVIATION PRECISION MANUFACTURING TECHNOLOGY, 2012, 48(2): 8～8(in Chinese).

[2] XU Ying, ZHAO Chenglan. Measurement of Slender Guide Straightness[J]. MARINE OPTICS, 2011, 47(3): 44～46(in Chinese).

[3] LE Yanfen，SHI Ying，JU Aisong. Design of Heterodyne interferometer signal detectors[J]. LASER TECHNOLOGY, 2012, 36(6): 759～762(in Chinese).

[4] PEI Zhongfang. Research on Laser Interference Alignment[D]. Master's degree paper of Tianjin University, 2004(in Chinese).

[5] JIA Lide, ZHENG Ziwen, LI Shengyi. Measurement Method of Straightness Error of a Long Ultra-precise Guideway with a Short Bechmark[J]. CHINESE JOURNAL OF MECHANICAL ENGINEERING, 2008, 44(9): 141～146(in Chinese).

DOI: 10.3901/jme.2008.09.141

[6] ZHANG Tiebi, SUN Shiwei, LI Guang. Design and Study of Elevator Rails Straightness Measurement System[J]. Instrument Technique and Sensor, 2010, 329(6)113～114(in Chinese).

[7] CHEN Jihua, ZHANG Jiming, LV Yunpeng. Design of Position Detector for Alignment Laser Line Based on the PSD[J]. MEASUREMENT & CONTRIL TECHNOLOGY, 2012, 31(10)8～11(in Chinese).

[8] GUAN M J, ZHAO D E. Research of the noise based on PIN type photoelectric conversion circuit[J]. ELECTRIC TEST. 2012, 20(2): 35～38(in Chinese).

[9] SHA D L, KONG Y X. Design of receive circuit for heterodyne interferometer[J]. CFHI TECHNOLOGY, 2008, 23(6): 66～68(in Chinese).