Vibration Control System of Precision Dicing Saw Machine Based on Neural Network Method

Abstract:

The precision dicing machine is adopted as the research object in the paper, the technology of grating sensor is selected to overcome the shortcoming of traditional compensation methods for inaccurate return compensate. The measurement is done through the grating sensor, with the aid of neural network feedback method, the fitting and compensation of the data measured by the grating sensor is completed, the deviation caused by vibration during the spindle run-time is eliminated. And the purpose of improving the precision of spindle is realized.

• Periodical: Applied Mechanics and Materials (Volume 577)
• Pages: 228-231
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.577.228
• Online since: July 2014
• Authors: Yan Ma*, Xue Feng Bai
• Keywords: Grating Sensor, Neural Network Method, Precision Dicing Saw Machine, Vibration Control

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DOI: 10.1016/s0378-4754(02)00029-0