Experimental Investigations on Effect of Particles Removal in Cleanroom with Non-Unidirectional Airflow

Yu Wang

doi:10.4028/www.scientific.net/AMM.580-583.2428

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 580-583Experimental Investigations on Effect of Particles...

Experimental Investigations on Effect of Particles Removal in Cleanroom with Non-Unidirectional Airflow

Abstract:

Efficient airflow delivery is key to achieve effective contamination control for a high-performance cleanroom. The influence of airflow organization on effect of particles removal in cleanroom with non-unidirectional airflow was investigated in this paper. A series of experiments were conducted on a cleanroom experimental platform with different airflow organization modes and supply air volume variation by frequency converter ( 40 to 50 Hz, 5Hz interval) on air-supply fan unit. The results showed that higher cleanliness could be gained at local area in cleanroom with radial airflow organization. Moreover, the outcomes from these experiments indicated that particle concentration at measuring points appeared more orderly when the cleanroom operated with radial airflow organization. The conclusion can be drawn that radial airflow can benefit contamination control at local area for cleanroom operation with non-unidirectional airflow when compared with ceiling-supply and wall-return airflow organization.

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Periodical:

Applied Mechanics and Materials (Volumes 580-583)

Pages:

2428-2431

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.580-583.2428

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Online since:

July 2014

Authors:

Yu Wang*

Keywords:

Cleanroom, Non-Unidirectional Airflow, Particles Removal

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* - Corresponding Author

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