Selective ZnO Nanorods Hydrothermal Growth through Resist Patterning Method

Abstract:

Resist patterning method has been used to enable selective ZnO nanorods grown via facile hydrothermal process. The growth region of the ZnO nanorods was controlled by pre-coating the seed layer on the Silicon base substrate. Using the plasma process, the seed layer which is not coated with a resist layer will be etched out. Therefore, when the samples completely undergone the hydrothermal process, there will be no nanorods grow in that specific area. The grown ZnO nanorods was in well array with flat hexagonal tip and wurtzite crystal structure. This technique is can be applied for application which require integration of nanostructure in specific critical areas such as an interdigitated electrodes (IDE) for various gas sensor applications.

• Periodical: Applied Mechanics and Materials (Volume 606)
• Pages: 51-54
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.606.51
• Online since: August 2014
• Authors: Amirul Abd Rashid*, Nor Hayati Saad, Daniel Bien Chia Sheng, Wai Yee Lee, Rashiddy Wong Freddawati
• Keywords: Gas Sensor, Hydrothermal Synthesis, Resist Patterning, Selective Growth, ZnO Nanowire

References

[1] Z.L. Wang, Zinc oxide nanostructures: growth, properties and applications, Journal of Physics: Condensed Matter 16. 25 (2004): R829.

DOI: 10.1088/0953-8984/16/25/r01

[2] S.M. Lukas and L.M.D. Judith, ZnO–nanostructures, defects, and devices, Materials today 10. 5 (2007): 40-48.

[3] B. Pal and S. Maheshwar, Enhanced photocatalytic activity of highly porous ZnO thin films prepared by sol–gel process, Materials chemistry and physics 76. 1 (2002): 82-87.

DOI: 10.1016/s0254-0584(01)00514-4

[4] G.C. Yi,W. Chunrai and P. Won, ZnO nanorods: synthesis, characterization and applications, Semiconductor Science and Technology20. 4 (2005): S22.

[5] X. Jiaqiang et al., Hydrothermal synthesis and gas sensing characters of ZnO nanorods, Sensors and Actuators B: Chemical 113. 1 (2006): 526-531.

DOI: 10.1016/j.snb.2005.03.097

[6] U. Ozgur et al., A comprehensive review of ZnO materials and devices, Journal of applied physics 98. 4 (2005): 041301-041301.

[7] V. G. Irene an L.C. Monica, Vertically-aligned nanostructures of ZnO for excitonic solar cells: a review, Energy & Environmental Science 2. 1 (2009): 19-34.

[8] S. Talam, S.R. Karumuri and N. Gunnam, Synthesis, Characterization and spectroscopic properties of ZnO nanoparticles, ISRN Nanotechnology, Volume 2012, Article ID 372505, DOI: 10. 5402/2012/372505.

DOI: 10.5402/2012/372505

[9] N.D. Tam,S. Karandeep, M. Meyyappan and M.O. Michael, Vertical ZnO nanowire growth on metal substrates, Nanotechnology 23 (2012) 194015. DOI 10. 1088/0957- 4484/23/19/194015.

DOI: 10.1088/0957-4484/23/19/194015

[10] R. Mohammed,S. Jinhui,N. Omer, L.W. Zhing and W. Magnus, Study of the piezoelectric power generation arrays grown by different methods, Advanced Functional Materials, 2010, xx, 1-6, DOI: 10. 1002/adfm. 201001203.

[11] J.H. Ting, L.H. Cheng J.C. Shoou, I.C. Chen, Laterally grown ZnO nanowire ethanol gas sensor, Sensors and actuators B 126 (2007) 473-477.

DOI: 10.1016/j.snb.2007.03.034

[12] K. Anuar W.Y. Lee, H.W. Lee. A.S. Teh, D.C.S. Bien, I.A. Azid, Effect of Seed Annealing Temperature and Growth Duration on Hydrothermal ZnO Nanorod Structures and their Electrical Characteristics, Applied Surface Science (2013).

DOI: 10.1016/j.apsusc.2013.06.159

[13] Abd Rashid Amirul et al. Effect of Oxygen Plasma Conditioning on Zinc Oxide (ZnO) Nanostructure Morphology in Hydrothermal Growth Method, International Conference On Nanomaterials (ICNM 13), Chennai, India.