Design and Analysis of a XY Micro-Motion Stage Based on S Type Flexible Mechanism

Abstract:

Piezoelectric materials is a kind of the most common smart materials whose geometric shape can be related to an energy input in the form of electric field. In the application of active materials to electromechanical energy conversion, electrical energy may be input to the material and the resulting deformation of the material can be used to move a load. In this paper, a XY micro-motion stage is designed based s type flexure mechanism and driven through piezoelectric ceramic stack. From the analysis, it can achieve X direction 6.5μm, Y direction 9.7μm micro-displacement output.The results indicate that, the XY micro-motion stage all are satisfy the need of design.

• Periodical: Applied Mechanics and Materials (Volumes 635-637)
• Pages: 1216-1219
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.635-637.1216
• Online since: September 2014
• Authors: Yue Min Yu*
• Keywords: Micro-Motion Stage, Piezoelectric Ceramic Stack, Smart Materials

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