A Pressure Sensor with Electrical Readout Based on IL Electrofluidic Circuit
This paper presents a novel pressure sensor based on IL electrofluidic circuit. The simple configuration makes the device capable of being seamlessly integrated to wide varieties of PDMS microfluidic devices. The experimental results demonstrate that IL-filled microfluidic channels can be utilized as electrical resistors to construct functional circuits, and an electrofluidic Wheatstone bridge circuit has been designed to construct the pressure sensor. In the pressure sensor performance characterization, the calibration results show that the gate voltage is linear proportional to the applied pressure with sensitivity of 8.45 mV/psi and the pressure as small as 2.5 psi can be easily detected.
S. P. Zhao "A Pressure Sensor with Electrical Readout Based on IL Electrofluidic Circuit", Applied Mechanics and Materials, Vols. 66-68, pp. 1936-1941, 2011