Vibration Simulation of Air Slide Table in Ultra Precision Machines
The compressed air vibration in air slide table of ultra precision machines is an obstacle for gaining Nano-metric level of accuracies in the products created by these machines. In this article, the vibration behavior of air slide table due to compressed air layer is analyzed. The air slide table fluid and dynamic analytical model has been derived. In order to have air exit velocity from clearance gap, the finite element software FLUENT was applied. Finally, in order to calculate the displacements of table due to vibration and drawing its curves via time at the presence of varieties of air pressure, the second order differential equation was solved by MATLAB. In solving differential equation the Rang-Kutta method was used.
M. Vahdati and S. A. Rasouli, "Vibration Simulation of Air Slide Table in Ultra Precision Machines", Applied Mechanics and Materials, Vols. 66-68, pp. 2158-2163, 2011