Preliminary Study on Resistance of Non-Treated and Treated ITO Films

Zaliman Sauli; Vithyacharan Retnasamy; Chai Jee Keng; Moganraj Palianysamy; Hussin Kamarudin

doi:10.4028/www.scientific.net/AMM.680.111

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 680Preliminary Study on Resistance of Non-Treated and...

Preliminary Study on Resistance of Non-Treated and Treated ITO Films

Abstract:

A study on the resistance of directly sputtered films and treated films of Indium Tin Oxide (ITO) is done to initiate an extensive study on the material. This study involves variation in terms of number of layers and duration of deposition. Treated films are produced by undergoing annealing process which is carried out using Split Type Tube Furnace. Resistance measurements were carried out using Semiconductor Parametric Analyzer (SPA). Results show that the directly sputtered ITO films produced lower resistance compared to the treated ITO films.

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Periodical:

Applied Mechanics and Materials (Volume 680)

Pages:

111-114

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.680.111

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Online since:

October 2014

Authors:

Zaliman Sauli*, Vithyacharan Retnasamy, Chai Jee Keng, Moganraj Palianysamy, Hussin Kamarudin

Keywords:

ITO, Reflectance, UV Lambda

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* - Corresponding Author

References

[1] Minami, T. (2008). Present status of transparent conducting oxide thin-film development for indium-tin-oxide (ITO) substitutes. Thin Solid Films, 516(17), 5822-5828.

DOI: 10.1016/j.tsf.2007.10.063

Google Scholar

[2] Cui, J., Wang, A., Edleman, N. L., Ni, J., Lee, P., Armstrong, N. R., & Marks, T. J. (2001).

Google Scholar

[3] Wu, Z., Chen, Z., Du, X., Logan, J. M., Sippel, J., Nikolou, M., .. &Rinzler, A. G. (2004). Transparent, conductive carbon nanotube films. Science, 305(5688), 1273-1276.

DOI: 10.1126/science.1101243

Google Scholar

[4] Zhou, N., Buchholz, D. B., Zhu, G., Yu, X., Lin, H., Facchetti, A., .. & Chang, R. P. (2014).

Google Scholar

[5] L. Gupta, A. Mansingh and P. K. Srivastava, Band Gap Narrowing and the Band Structure of Tin Doped Indium Oxide Films, Thin Solid Films, 176, 1989, p.33 – 44.

DOI: 10.1016/0040-6090(89)90361-1

Google Scholar

[6] P. Nath and R. F. Bunshah, Preparation of In2O3 and Tin-Doped In2O3 Films by a Novel Activated Reactive Evaporation Technique, Thin Solid Films, 69, 1980, p.63 – 68.

DOI: 10.1016/0040-6090(80)90204-7

Google Scholar

[7] D. Cairns, G. Crawford, Electromechanical Properties of Transparent Conducting Substrates for FlexibleElectronic Displays, Proceedings of the IEEE, Vol 93. August (2005).

DOI: 10.1109/jproc.2005.851515

Google Scholar

[8] Terzini, E., Thilakan, P., &Minarini, C. (2000). Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature. Materials Science and Engineering: B, 77(1), 110-114.

DOI: 10.1016/s0921-5107(00)00477-3

Google Scholar