Surface Roughness and Grain Size Analysis of Treated Indium Tin Oxide(ITO)Film

Vithyacharan Retnasamy; Zaliman Sauli; Steven Taniselass; Norhawati Ahmad; Chai Jee Keng; Hussin Kamarudin

doi:10.4028/www.scientific.net/AMM.680.131

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 680Surface Roughness and Grain Size Analysis of...

Surface Roughness and Grain Size Analysis of Treated Indium Tin Oxide(ITO)Film

Abstract:

An initial study has been conducted to characterize the surface morphology of treated Indium Tin Oxide (ITO). Treatment done is annealing process where the samples are put through heat and annealed for an hour. Time of deposition and layers of ITO has been varied to study the correlation between both.The treated ITO are examined under Atomic Force Microscopy (AFM) for the surface roughness and the grain size. Results shows that deposition time of ITO do play an important role in determining a desired grain size in ITO material.

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Periodical:

Applied Mechanics and Materials (Volume 680)

Pages:

131-134

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.680.131

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Online since:

October 2014

Authors:

Vithyacharan Retnasamy*, Zaliman Sauli, Steven Taniselass, Norhawati Ahmad, Chai Jee Keng, Hussin Kamarudin

Keywords:

Grain Size, Surface Roughness (SR), Treated ITO Film

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