A Phase Compensation Technique of Sampling Moiré Method for Accurate Single-Shot Phase Analysis
Recently, a technique for fast and accurate phase analysis called sampling moiré method has been developed for measurement of small-displacement distribution. In this study, a distribution of phase error caused by linear interpolation in case with mismatch between the sampling pitch and the grating pitch is theoretically analyzed. Moreover, a technique for effective phase compensation is proposed to reduce the periodic phase error. The performance of our compensation method is validated by a computer simulation. Phase analysis can be performed more accurately even in the case that the sampling pitch does not match to the grating pitch strictly.
R. L. Burguete, M. Lucas, E. A. Patterson, S. Quinn
S. Ri et al., "A Phase Compensation Technique of Sampling Moiré Method for Accurate Single-Shot Phase Analysis", Applied Mechanics and Materials, Vol. 70, pp. 243-248, 2011