A Phase Compensation Technique of Sampling Moiré Method for Accurate Single-Shot Phase Analysis

Abstract:

Recently, a technique for fast and accurate phase analysis called sampling moiré method has been developed for measurement of small-displacement distribution. In this study, a distribution of phase error caused by linear interpolation in case with mismatch between the sampling pitch and the grating pitch is theoretically analyzed. Moreover, a technique for effective phase compensation is proposed to reduce the periodic phase error. The performance of our compensation method is validated by a computer simulation. Phase analysis can be performed more accurately even in the case that the sampling pitch does not match to the grating pitch strictly.

• Periodical: Applied Mechanics and Materials (Volume 70)
• Pages: 243-248
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.70.243
• Online since: August 2011
• Authors: Shien Ri, Takashi Muramatsu, Masumi Saka
• Keywords: Down-Sampling, Phase Compensation, Sampling Pitch, Spatial Phase Shifting Method

References

[1] J. C. Wyant: Laser Focus (1982), pp.65-71.

[2] P. D. Groot: Applied Optics Vol. 34 (1995), pp.4723-4730.

[3] M. Takeda, H. Ina, S. Kobayashi: J. Opt. Soc. Am. Vol. 72 (1982), pp.156-160.

[4] M. Kujawinska, I. Wojciak: Proc SPIE Vol. 1508 (1991), pp.61-67.

[5] M. Pirga, M. Kujawinska: Opt. Eng. Vol. 34 (1995), pp.2459-2466.

[6] K. Creath, J. Schmit: Opt. Lasers Eng. Vol. 24 (1996), pp.365-379.

[7] S. Ri, M. Fujigaki, Y. Morimoto: Exp. Mech. Vol. 54 (2010), pp.501-508.

[8] Y. Arai, S. Yokozeki, K. Shiraki, T. Yamada: J. Mod. Opt. Vol. 44 (1997), pp.739-751.

[9] Y. Morimoto, M. Fujigaki, A. Masaya, H. Kondo, T. Inuzuka: Advanced Materials Research Vol. 79-82 (2009), pp.1731-1734.

DOI: 10.4028/www.scientific.net/amr.79-82.1731

[10] S. Ri, T. Muramatsu: Meas. Sci. Technol. Vol. 21 (2010), 025305 (8pp).

[11] S. Ri, T. Muramatsu, M. Saka, K. Nanbara, D. Kobayashi: AIP Proc. Vol. 1236 (2010), pp.363-368.