AFM Study of Magnetron Sputtered Nickel Films Coated on Cenosphere Particles

Xiao Zheng Yu

doi:10.4028/www.scientific.net/AMM.713-715.2585

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 713-715AFM Study of Magnetron Sputtered Nickel Films...

AFM Study of Magnetron Sputtered Nickel Films Coated on Cenosphere Particles

Abstract:

The morphologies of nanocrystalline nickel film coated on cenosphere particles using magnetron sputtering method were investigated by atomic force microscopy (AFM). The AFM results show the grain sizes and root-mean-square (RMS) roughness values of nickel films increase with the increase of sputtering power or deposition time and the nickel films growth is a three-dimensional island growth mode. The unceasingly variational angular distribution can get rid of the physical shadowing effect of the sputtering and promote a rather smooth film growth. Due to the all-around effect, the final distribution of grains shows a rather smooth morphology with low roughness.

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Periodical:

Applied Mechanics and Materials (Volumes 713-715)

Pages:

2585-2589

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.713-715.2585

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Online since:

January 2015

Authors:

Xiao Zheng Yu*

Keywords:

AFM, Cenosphere, Magnetron Sputtering, Metal Films

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* - Corresponding Author

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