Effects of Nano-Diamond Seeds on Mechanical Properties and Surface Morphology of Diamond-Like Carbon Films

Yu Luo; Qing Yun Chen; Huan Yuan; Ming Xu; Shu Long Huang

doi:10.4028/www.scientific.net/AMM.723.502

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 723Effects of Nano-Diamond Seeds on Mechanical...

Effects of Nano-Diamond Seeds on Mechanical Properties and Surface Morphology of Diamond-Like Carbon Films

Abstract:

The effects of nano-diamond seeds on the performance of diamond-like carbon (DLC) films were investigated. In this study, the high uniform DLC films were deposited on substrates seeded with nano-diamond by using a magnetron sputtering system. Then, the effects of nano-diamond seeds on DLC films were determined. Raman spectroscopy revealed a decrease of sp3 fraction due to the introduction of nano-diamond seeds. Atomic force microscope (AFM) observed all samples have an average root mean square (RMS) roughness of 1.8 nm. Scanning electron microscopy (SEM) displayed that a large number of small size conical hillock geometrical anomalies can be caused by nano-diamond seeds. Indentation tests revealed that nano-diamond seeds can enhance the hardness of DLC films, whose hardness range is from 28.3 GPa to 32.1 GPa in this work.

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Periodical:

Applied Mechanics and Materials (Volume 723)

Pages:

502-506

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.723.502

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Online since:

January 2015

Authors:

Yu Luo, Qing Yun Chen*, Huan Yuan, Ming Xu, Shu Long Huang

Keywords:

Diamond-Like Carbon (DLC) Film, Magnetron Sputtering, Mechanical Property, Nano-Diamond Seeds, Surface Morphology

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