The Simulated Calculation of Electric Impedance Sensor

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In this paper, the electric impendence sensor is simulated calculation with COMSOL Multiphysics. The relationship between impedance and x-displacement of air cavity, the relationship between impedance and y-displacement of air cavity, and the relationships between impedance and radius of air cavity are obtained.

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7-10

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March 2015

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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