Improvement of Surface Properties of Micro-Mold via SAM Coating for Fabrication of Microfluidic Device

Biswajit Saha; Jung Hoon Lee

doi:10.4028/www.scientific.net/AMM.752-753.159

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 752-753Improvement of Surface Properties of Micro-Mold...

Improvement of Surface Properties of Micro-Mold via SAM Coating for Fabrication of Microfluidic Device

Abstract:

N-octadecyltrichlorosilane [OTS, CH₃(CH₂)₁₇SiC_l3] self-assembled monolayer (SAM) coatings were deposited on Si micromolds by dip-coating. Chemical composition, surface roughness, friction coefficient, thermal stability and surface energy of coatings were investigated. OTS coated silicon (Si) micromolds were used to fabricate PMMA microfluidic devices by hot-embossed process. All OTS coatings were thermally stable up to 180 °C, which is higher than hot-embossing temperature of PMMA. OTS coated micromolds had low friction coefficient, adhesion and superior molding efficiency, which improved lifetime of a uncoated Si micromold from 3 to 27 times.

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Periodical:

Applied Mechanics and Materials (Volumes 752-753)

Pages:

159-162

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.752-753.159

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Online since:

April 2015

Authors:

Biswajit Saha*, Jung Hoon Lee

Keywords:

Friction Coefficient (FC), Micromolding, OTS Coating, Surface Energy

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