Synthesis of Superhard Coatings Using Pulsed Beams of High-Energy Gas Molecules

Sergey Nikolaevich Grigoriev; Anton Evgenievich Seleznev

doi:10.4028/www.scientific.net/AMM.752-753.172

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 752-753Synthesis of Superhard Coatings Using Pulsed Beams...

Synthesis of Superhard Coatings Using Pulsed Beams of High-Energy Gas Molecules

Abstract:

It is proposed to use for synthesis of superhard and fracture tough nanocomposite coatings on dielectric products with deep cavities a source of metal atoms accompanied by pulsed beams of high-energy neutral gas molecules. Slow and fast particles are produced by one and the same plasma emitter of ions and trajectories of their movement from a common emissive grid to the product surface coincide.

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Periodical:

Applied Mechanics and Materials (Volumes 752-753)

Pages:

172-176

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.752-753.172

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Online since:

April 2015

Authors:

Sergey Nikolaevich Grigoriev*, Anton Evgenievich Seleznev

Keywords:

Coating Synthesis, High-Energy Molecules, Implantation, Metal Atoms, Pulsed Beams

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References

[1] J. Amano and R. Lawson, Thin film deposition using low energy ion beams (3) Mg + ion-beam deposition and analysis of deposits, J. Vac. Sci. Technol. 14 (1977) 695-698.

DOI: 10.1116/1.569185

Google Scholar

[2] G.K. Wolf, Modification of mechanical and chemical properties of thin films by ion bombardment, Surf. Coat. Technol. 43-44 (1990) 920-935.

DOI: 10.1016/b978-1-85166-813-7.50092-9

Google Scholar

[3] E. Grigore, C. Ruset, K.T. Short, D. Hoeft, H. Dong, X.Y. Li and T. Bell, In situ investigation of the internal stress within the nc-Ti2N/nc-TiN nanocomposite coatings produced by a combined magnetron sputtering and ion implantation method, Surf. Coat. Technol. 200 (2005).

DOI: 10.1016/j.surfcoat.2005.02.118

Google Scholar

[4] A.S. Metel, Beams of fast neutral atoms and molecules in low-pressure gas-discharge plasma, Plasma Phys. Rep. 38 (2012) 254-262.

DOI: 10.1134/s1063780x12020080

Google Scholar

[5] A.S. Metel, S.N. Grigoriev, Y.A. Melnik and V.P. Bolbukov, Broad beam sources of fast molecules with segmented cold cathodes and emissive grids, Instrum. Exper. Tech. 55 (2012) 122-130.

DOI: 10.1134/s0020441211060170

Google Scholar

[6] A.F. Cakir, A. Metel, M. Urgen and S. Grigoriev, Arc-PVD Coating of Metallic and Dielectric Substrates Using Neutral Molecular Beam Source Pretreatment, Galvanotechnik, 91 (2000) 768-776.

Google Scholar

[7] A.S. Metel, S.N. Grigoriev, Y.A. Melnik and V.P. Bolbukov, Characteristics of a fast neutral atom source with electrons injected into the source through its emissive grid from the vacuum chamber, Instrum. Exper. Tech. 55 (2012) 288-293.

DOI: 10.1134/s0020441212010186

Google Scholar

[8] A.S. Metel, Characteristics of the detection of a quasi-stationary state of the heavy-current glow discharge with a hollow-space cathode at low gas pressure, Sov. Phys. Tech. Phys. 31 (1986) 1395-1405.

Google Scholar

[9] A.S. Metel, Y.A. Melnik and V.V. Panin, Non-self-sustained glow discharge with electrostatic confinement of electrons sustained by a fast neutral molecule beam, Plasma Phys. Rep. 37 (2011) 357-365.

DOI: 10.1134/s1063780x11040088

Google Scholar

[10] A. Metel, S. Grigoriev, Y. Melnik, V. Panin and V. Prudnikov, Cutting tools nitriding in plasma produced by a fast neutral molecule beam, Jpn. J. Appl. Phys. 50 (2011) 08JG04-1-4.

DOI: 10.7567/jjap.50.08jg04

Google Scholar

[11] A.S. Metel, V.P. Bolbukov, M.A. Volosova, S.N. Grigoriev and Y.A. Melnik, Equipment for deposition of thin metallic films bombarded by fast argon atoms, Instrum. Exper. Tech. 57 (2014) 345-351.

DOI: 10.1134/s0020441214020110

Google Scholar