Volume Self–Sustained Discharge in Atmospheric Pressure Gas with High Pulse Repetition Frequency

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The paper describes a plasma source based on a self-sustained volume discharge for diamond and diamond-like film deposition. The suggested scheme of the electrode system enables to provide stable combustion of the self-sustained volume discharge with high pulse repetition rate in atmospheric pressure gases. Gas flow rate to blow off the interelectrode gap depending on the anode temperature has been considered.

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269-274

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April 2015

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.1134/s0033173207050025

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