Effect of Nitrogen-to-Total Gas Flow Ratio on the Nanocomposite TiAlBN Coating

Zulkifli Rosli; Wai Loon Kwan; Mohd Warikh Abdul Rashid; Jariah Mohd Juoi; Nafarizal Nayan

doi:10.4028/www.scientific.net/AMM.761.431

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 761Effect of Nitrogen-to-Total Gas Flow Ratio on the...

Effect of Nitrogen-to-Total Gas Flow Ratio on the Nanocomposite TiAlBN Coating

Abstract:

A nanocomposite TiAlBN (n-TiAlBN) coating has been successfully deposited via RF magnetron sputtering by varying the nitrogen-to-total gas flow ratio (R_N) at a substrate temperature of 300 °C. The coating was deposited on AISI 316 substrates using a single Ti-Al-BN hot-pressed target. The crystal phases, grain size and chemical composition of the coatings were measured using the glancing angle X-ray diffraction analysis (GAXRD) and X-ray photoelectron spectroscopy (XPS). The grains size of the n-TiAlBN coating was found to be within the range of 3.5 to 5.7 nm calculated using Scherrer’s formula. The n-TiAlBN coating reached a nitride saturated state at a higher R_N (e.g >15%) with the amount of boron concentration to be around 9 at. %. Further, reducing the R_N (e.g. 5%) has increased the boron concentration to 16.17 at. %. This paper shows that by carefully control the nitrogen-to-total gas flow ratio (R_N) in the n-TiAlBN coating, it indeed gives a significant effect on its crystallographic structure, grain size, and chemical compositions.

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Periodical:

Applied Mechanics and Materials (Volume 761)

Pages:

431-435

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.761.431

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Online since:

May 2015

Authors:

Zulkifli Rosli*, Wai Loon Kwan, Mohd Warikh Abdul Rashid, Jariah Mohd Juoi, Nafarizal Nayan

Keywords:

GAXRD, Grain Size, Nanocomposite, RF Magnetron Sputtering, TiAlBN, XPS

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