Consideration of Factors Towards Lowering the Natural Frequency of MEMS Based Cantilever Structure: Top Mass versus Back Etch Design

Abstract:

The ability to self-energize wireless sensor node promote the popularity of energy harvesting technique especially by using ambient vibration as the source of energy. In addition, the successful integration of the energy harvesting element on the same wafer as a wireless sensor node will promote the production in the MEMS scale and will reduce the overall cost of production. The usage of the cantilever structure as the transducer for converting mechanical energy (vibration) due to deflection of cantilever into the electrical energy is possible by depositing piezoelectric material on the cantilever. The usage of cantilever provide the simplest way for fabrication in the MEMS scale and also provide the ability to achieve low natural frequency. This paper present the work done on the simulation of the cantilever structure with the top end and back etch proof mass towards achieving low natural frequency in the MEMS scale by using IntelliSuite software.

• Periodical: Applied Mechanics and Materials (Volume 780)
• Pages: 39-44
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.780.39
• Online since: July 2015
• Authors: A.W. Khairul Adly*, Y. Wahab, A.Y.M. Shakaff, Mazlee Mazalan
• Keywords: Ambient Vibration, Cantilever, Energy Harvesting, Intellisuite, MEMS

References

[1] S. Roundy et al., A study of low level vibration as a power source for wireless sensor nodes, Comput. Commun. 26 (2003)1131-1144.

DOI: 10.1016/s0140-3664(02)00248-7

[2] A.W. Khairul Adly, M.S. Ali Yeon, W. Yufridin, M. Mazlee, Considering Factors in Fabricating MEMS Vibration Energy Harvester as an Alternative Energy for Wireless Sensor, Australian Journal of Basic and Applied Sciences, 8(4) Special 2014, Pages: 360-368.

[3] J. Q. Liu et al., A MEMS based piezoelectric power generator array for vibration energy harvesting, Microelectronic Journal39 (2008) 802-806.

[4] Jagan Mohan Reddy Kudimi, Faisal Mohd-Yasin, Sima Dimitrijev, SiC-Based Piezoelectric Energy Harvester for Extreme Environment, Procedia Engineering 47 ( 2012 ) 1165 – 1172.

DOI: 10.1016/j.proeng.2012.09.359

[5] F. Stoppel, C. Schröder, F. Senger, B. Wagner, W. Benecke, AlN-based piezoelectric micropower generator for low ambient vibration energy harvesting, Procedia Engineering 25 (2011) 721–724.

DOI: 10.1016/j.proeng.2011.12.178

[6] C.T. Pan , Z.H. Liu, Y.C. Chen, Study of broad bandwidth vibrational energy harvesting system with optimum thickness of PET substrate, Current Applied Physics 12 (2012) 684-696.

DOI: 10.1016/j.cap.2011.10.005

[7] S. S. Rao, Mechanical Vibration, Pearson Prentice Hall, (2004).