Finite Element Analysis on Vibration of a Piezoelectric Micro Pump

Abstract:

Due to the rise of biological and MEMS technology in recent years, some micro flow system components have been paid attentions to developed by many investigators. The importance of micro-pumps manufactured is higher than the other part of micro flow system since it is the power source of the entire micro-flow system and responsible for driving working fluid in the microfluidic system. In actual operation, the instability and bad dynamic characteristics of the micro-pump will cause larger fluid flow mobility error, such as transport behavior and response procedures failure, etc., and even damage the microfluidic system. Therefore, to investigate the stability and dynamic characteristics of a micro pump is necessary. The miniature piezoelectric film micro-pump, made by Microjet Technology Co., Ltd., is employed to study in this work. The computer graphics software SolidWorks is used to build the model of the micro pump. Then, The Finite element analysis (FEA), ANSYS Workbench, is also employed to analyze the dynamic characteristics of this micro pump.

• Periodical: Applied Mechanics and Materials (Volumes 789-790)
• Pages: 861-864
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.789-790.861
• Online since: September 2015
• Authors: Bo Wun Huang*, Jung Ge Tseng, Chien Hua Chang
• Keywords: Finite Element Analysis, Micro Pump, Piezoelectric, Time Response

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