The Calibration of the Pressure Sensor at the Ultra-Low Temperature

Article Preview

Abstract:

With the development of modern industrial society, the need of measuring the pressure parameters at the ultra-low temperature is proposed. However, there is no developed products of ultra-low pressure sensors at home and abroad, and reports related to ultra-low pressure sensors such as the structural design of and methods of test and calibration are also few. This paper mainly describes a method for test and calibration of the pressure sensor at the ultra-low temperature. Based on the requirements obtained under the ultra-low temperature condition, a calibration device for the pressure sensor at the ultra-low temperature is designed, and the specific calibration instructions of some parameters are given.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

698-703

Citation:

Online since:

July 2011

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2011 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] Yanzhong Li, Lin Su, Jiang Wang, Yuwen Zhang. Temperature Affection of Pressure Transducer and Its Verification System. In: The Conference Proceedings of The Sixth national Cryogenic Engineering and Refrigeration Engineering Conference [C]. Xi'an: Xi'an Jiaotong University Press, 2003: 438-442.

Google Scholar

[2] Xianghua Cheng, Yanzhong Li, Hongbo Tan. The analysis of the effect on temperature characteristic of pressure transducer[J]. LT Electronics, 2006, 34(1), 63- 67.

Google Scholar

[3] Fuyan Yin, Chenglin Wang. How To Making Resistance Strain Gauge Transducer For Low Temperature[J]. Sensor World, 2002(09), 5-8.

Google Scholar

[4] Xiaohuan Li,Qili Zou,Shiming Zhang. Research of Ultra Low Temperature Thin Film Pressure Sensor[J]. Instrument Technique and Sensor, 2009, supplement, 171-174.

Google Scholar

[5] Jian Wang, Rongyan Chuai, Xiaoyu He, etc. Polysilicon Nano-film Piezoresistive Pressure Sensor[J]. Instrument Technique and Sensor, 2009, (9), 6-8.

Google Scholar