The Calibration of the Pressure Sensor at the Ultra-Low Temperature
With the development of modern industrial society, the need of measuring the pressure parameters at the ultra-low temperature is proposed. However, there is no developed products of ultra-low pressure sensors at home and abroad, and reports related to ultra-low pressure sensors such as the structural design of and methods of test and calibration are also few. This paper mainly describes a method for test and calibration of the pressure sensor at the ultra-low temperature. Based on the requirements obtained under the ultra-low temperature condition, a calibration device for the pressure sensor at the ultra-low temperature is designed, and the specific calibration instructions of some parameters are given.
Linli Xu, Wenya Tian and Elwin Mao
J. Zhang et al., "The Calibration of the Pressure Sensor at the Ultra-Low Temperature", Applied Mechanics and Materials, Vols. 80-81, pp. 698-703, 2011