Photolithographic Process for Creating Micro-Grating on Silicon Substrate for Biosensor Application

Abstract:

In this work, we use photolithography in order to fabricate micro-grating structures on silicon. The first step of device was coated by 3.5 μm thick silicon dioxide (SiO₂) film on top side, whereas the bottom side was coated with 4.5 μm. Next, we deposited silicon nitride (Si₃N₄) film of 2 μm by plasma-enhanced chemical vapor deposition, and used photolithography to prepare the gratings. We compared micro-grating period sizes of 1 μm, 0.8 μm and 0.5 μm, and found the 0.5 μm gave the best sensitivity. These devices can be applied with detection in biosensing in the future.

• Periodical: Applied Mechanics and Materials (Volume 804)
• Pages: 159-162
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.804.159
• Online since: October 2015
• Authors: Naphat Chathirat*, Charndet Hruanun, Amporn Poyai
• Keywords: Biosensing, Biosensors, Micro-Grating Structure, Photolithography

References

[1] A. Brandenburg, R. Polzius, F. Bier, U. Bilitewski, and E. Wagner, Direct observation of affinity reactions by reflected-mode operation of integrated optical grating coupler, Sens. Actuators B 30(1), 55–59 (1996).

DOI: 10.1016/0925-4005(95)01747-j

[2] V.S. -Y. Lin, K. Motesharei, K. -P.S. Dancil, M.J. Sailor, M.R. Ghadiri, A porous silicon-based optical interferometric biosensor, Science, 1997, 278, 840-843.

DOI: 10.1126/science.278.5339.840

[3] Leo L. Chan, Brian T. Cunningham, Member IEEE, Peter Y. Li, Derek Puff, A Self-Referencing Method for Microplate Label-Free Photonic-Crystal Biosensors, IEEE Sensors Journal, 2006, 6, 1551-1556.

DOI: 10.1109/jsen.2006.884547

[4] C.E. Jordan, R.M. Corn, Surface plasmon resonance imaging measurements of electrostatic biopolymer adsorption onto chemically modified gold surfaces, Anal Chem, 1997, 69, 1449-1456.

DOI: 10.1021/ac961012z

[5] F. Morhard, J. Pipper, R. Dahint, M. Grunze, Immobilization of antibodies in micropatterns for cell detection by optical diffraction, Sensors and Actuators B, 2000, 70, 232-242.

DOI: 10.1016/s0925-4005(00)00574-8

[6] G. Jin, P. Tengvall, I. Lundstrom, H. Arwin, A biosensor concept based on imaging ellipsometry for visualization of biomolecular interactions, Anal Biochem, 1995, 232, 69-72.

DOI: 10.1006/abio.1995.9959

[7] C. Brian, P. Li, L. Bo, P. Jane, Colorimetric resonant reflection as a direct biochemical assay technique, Sensors and Actuators B, 2002, 81, 316-328.

DOI: 10.1016/s0925-4005(01)00976-5

[8] Germain Chartier. Introduction to Optics, Springer, 2005, 299-322.

[9] R. Magnusson, S.S. Wang. New principle for optical filters. Appl Phy Lett, 1992, 61, 1022-1024.

[10] Naphat Chathirat, Nithi Atthi, Charndet Hruanun, Amporn Poyai, Suthisa Leasen, Tanakorn Osotchan, and Jose H. Hodak‏ A Micrograting Sensor for DNA Hybridization and Antibody Human Serum Albumin-Antigen Human Serum Albumin Interaction Experiments, Japanese Journal of Applied Physics (JJAP), Vol. 50, 1 . (2010).

DOI: 10.7567/jjap.50.01bk01