Design and Fabrication of PDMS/PMMA-Based Rotary Micropump

Abstract:

A novel micropump is proposed comprising a PMMA-based rotor, a circular PDMS micro-chamber, and a semi-circular PDMS microchannel connecting the inlet and outlet reservoirs as the rotor spins, a plug of sample fluid is trapped within the microchannel between neighboring blades of the rotor and is driven through the channel toward the outlet. Meanwhile, the rotors periodically compress and release the inlet and outlet regions of the microchannel. Thus, as the rotor turns, one plug of sample fluid is drawn into the microchannel as another is ejected into the outlet reservoir. In other words, a peristaltic pumping effect is achieved. It is shown that the flow rate in the proposed device can be controlled simply by adjusting the rotational velocity of the rotor. A maximum flow rate of 1.22 ml/min is obtained given de-ionized water as the working fluid and a rotational velocity of 232 rpm. Moreover, given the same rotational velocity, flow rates of 0.724 ml/min and 0.336 ml/min are obtained for salad oil and engine oil, respectively.

• Periodical: Applied Mechanics and Materials (Volume 829)
• Pages: 29-34
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.829.29
• Online since: March 2016
• Authors: Lung Ming Fu, Wen Teng Wang, Chia Yen Lee*
• Keywords: MEMS, Microfluidic, PDMS, PMMA, Rotary Micropump

References

[1] C.H. Lin, W.N. Wang, L.M. Fu, Integrated microfluidic chip for rapid DNA digestion and time-resolved capillary electrophoresis analysis. Biomicrofluidics, 6 (2012) 012818.

DOI: 10.1063/1.3654950

[2] L.M. Fu., W.J. Ju, Y.N. Wang, R.J. Yang, Rapid prototyping of glass-based microfluidic chips utilizing two-pass defocused CO2 Laser beam method. Microfluid. Nanofluid. 14 (2013) 479-487.

DOI: 10.1007/s10404-012-1066-8

[3] L.M. Fu, W.J. Ju, R.J. Yang, Y.N. Wang, Integrated microfluidic array chip and LED photometer system for sulfur dioxide and methanol concentration detection. Chem. Eng. J. 243 (2014) 421-427.

DOI: 10.1016/j.cej.2013.12.096

[4] L.M. Fu, Y.N. Wang, C.C. Liu, An integrated microfluidic chip for formaldehyde analysis in Chinese herbs. Chem. Eng. J. 244 (2014) 422-428.

DOI: 10.1016/j.cej.2014.01.085

[5] L.M. Fu, T.F. Hong, C.Y. Wen, C.H. Lin, C.H. Tsai, Electrokinetic instability effects in microchannels with and without nanofilm coatings. Electrophoresis. 29 (2008) 4871-4879.

DOI: 10.1002/elps.200800455

[6] M.T. Ke, J.H. Zhong, C.Y. Lee, Electromagnetically-actuated reciprocating pump for high-flow-rate microfluidic applications. Sensors. 12 (2012) 13075-13087.

DOI: 10.3390/s121013075

[7] C.Y. Lee, C.Y. Wen, H.H. Hou, R.J. Yang, C.H. Tsai, L.M. Fu, Design and packaging of MEMS-based flow-rate and flow-direction microsensor. Microfluid. Nanofluid. 6 (2009) 363-371.

DOI: 10.1007/s10404-008-0381-6

[8] L.M. Fu, W.J. Ju, C.H. Tsai, H.H. Hou, Y.N. Wang, R.J. Yang, Chaotic vortex micromixer utilizing gas pressure driving force. Chem. Eng. J. 214 (2013) 1-7.

DOI: 10.1016/j.cej.2012.10.032

[9] L.M. Fu, W.C. Fang, H.H. Hou, Y.N. Wang, T.F. Hong, Rapid vortex microfluidic mixer utilizing double-heart chamber. Chem. Eng. J. 249 (2014) 246–251.

DOI: 10.1016/j.cej.2014.03.037

[10] T.H. Wang, Y.W. Tsai, C.H. Tsai, C.Y. Lee, L.M. Fu, Design and analysis of impedance pumps utilizing electromagnetic actuation. Sensors 10 (2010) 4040-4052.

DOI: 10.3390/s100404040

[11] M.J. Davies, I.D. Johnston, C.K.L. Tan, M.C. Tracey, Whole blood pumping with a microthrottle pump. Biomicrofluidics 4 (2010) 044112.

DOI: 10.1063/1.3528327

[12] R. Gorkin, Clime, L, M. Madou, H. Kido, Pneumatic pumping in centrifugal microfluidic platforms . Microfluid. Nanofluid. 9 (2010) 541 – 549.

DOI: 10.1007/s10404-010-0571-x

[13] Y.M. Senousy, C.K. Harnett, Fast three dimensional ac electro-osmotic pumps with nonphotolithographic electrode patterning. Biomicrofluidics. 4 (2010) 036501.

DOI: 10.1063/1.3463719

[14] S. Ogden, L. Klintberg, G. Thornell, K. Hjort, G. Bodén, Review on miniaturized paraffin phase change actuators, valves, and pumps. Microfluid. Nanofluid. 17 (2014) 53-71.

DOI: 10.1007/s10404-013-1289-3

[15] H.T. Chang, C.Y. Lee, C.Y. Wen, Design and modeling of electromagnetic actuator in MEMS-based valveless impedance pump. Microsyst. Tech. 13 (2007) 1615–1622.

DOI: 10.1007/s00542-006-0332-7

[16] H.T. Chang, C.Y. Lee, C.Y. Wen, B.S. Hong, Theoretical analysis and optimization of electromagnetic actuation in a valveless micro impedance pump. Microelectro. J. 38 (2007) 791-799.

DOI: 10.1016/j.mejo.2007.04.013

[17] C.Y. Lee, H.T. Chang, C.Y. Wen, A MEMS-based valveless impedance pump utilizing electromagnetic actuation. J. Micromech. Microeng. 18 (2008) 085026.

DOI: 10.1088/0960-1317/18/3/035044

[18] C.Y. Lee, J.C. Leong, T.N. Wang, L.M. Fu, S.J. Chen, AfFerrofluidic magnetic micropump for variable-flow-rate applications. Jpn. J. Appl. Phys. 51 (2012) 047201.

DOI: 10.1143/jjap.51.047201

[19] M. Du, X. Ye, K. Wu, Z. Zhou, A peristaltic micro pump driven by a rotating motor with magnetically attracted steel balls, Sensors 9 (2009) 2611-2620.

DOI: 10.3390/s90402611

[20] H.W. Lee, I.H.A. Azid, Neuro-genetic optimization of the diffuser elements for applications in a valveless diaphragm micropump system, Sensors 9 (2009) 7481-7497.

DOI: 10.3390/s90907481

[21] C.T. Wang, T.S. Leu, J.M. Sun, Optimal design and operation for a no-moving-parts-valve (NMPV) micro-pump with a diffuser width of 500 µm. Sensors 9 (2009) 3666-3678.

DOI: 10.3390/s90503666

[22] A. Rossetti, R. Pavesi, G. Ardizzon, Experimental and numerical analyses of micro rotary shaft pumps. J. Micromech. Microeng. 19 (2009) 125013.

DOI: 10.1088/0960-1317/19/12/125013