Surface Layer Damage of Quartz Glass Induced by Ultra-Precision Grinding with Different Grit Size

Zong Chao Geng; Shang Gao; Ren Ke Kang; Zhi Gang Dong

doi:10.4028/www.scientific.net/AMM.872.19

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 872Surface Layer Damage of Quartz Glass Induced by...

Surface Layer Damage of Quartz Glass Induced by Ultra-Precision Grinding with Different Grit Size

Abstract:

Quartz glass is a typical hard and brittle material. During the manufacturing process of quartz glass components, ultra-precision grinding is widely used due to its high throughput and good dimensional accuracies. However, grinding will unavoidably induce large surface and subsurface damage. In this study, the surface and subsurface damage characteristics of quartz glass substrates ground by diamond wheels with different grit sizes were investigated in terms of surface roughness, surface topography, subsurface microcrack characteristic, and subsurface damage depth. Discussion was also provided to explore corresponding reasons of surface and subsurface damage induced by diamond grinding wheels with different grit sizes of #1500 and #2000. The experiment results showed that the surface roughness, surface damage, and subsurface damage depth induced by #2000 quartz glass was ground by #1500 diamond grinding wheel, and in ductile mode when ground by #2000 diamond grinding wheel.

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Periodical:

Applied Mechanics and Materials (Volume 872)

Pages:

19-24

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.872.19

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Online since:

October 2017

Authors:

Zong Chao Geng, Shang Gao*, Ren Ke Kang, Zhi Gang Dong

Keywords:

Grinding, Quartz Glass , Subsurface Damage, Surface Damage, Surface Roughness

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* - Corresponding Author

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