Defects Induced in Silicon by Rapid Thermal Processing

Abstract:

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Periodical:

Edited by:

M. Zahir

Pages:

361-368

DOI:

10.4028/www.scientific.net/AMR.1-2.361

Citation:

B. Hartiti et al., "Defects Induced in Silicon by Rapid Thermal Processing", Advanced Materials Research, Vols. 1-2, pp. 361-368, 1994

Online since:

September 1994

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