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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 1-2Defects Induced in Silicon by Rapid Thermal...

Defects Induced in Silicon by Rapid Thermal Processing

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Physical Chemistry of Solid State Materials

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Periodical:

Advanced Materials Research (Volumes 1-2)

Pages:

361-368

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1-2.361

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Online since:

September 1994

Authors:

B. Hartiti, H. Amzil, D. Sayah, J.C. Muller, P. Siffert

Keywords:

Annealing, CFA, Defect, DLTS, RTP, Silicon

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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