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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 1-2Effects of Annealing and Ion Bombardment on...

Effects of Annealing and Ion Bombardment on Structure and Composition of Ti-Al Alloy Films

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Physical Chemistry of Solid State Materials

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Periodical:

Advanced Materials Research (Volumes 1-2)

Pages:

391-398

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1-2.391

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Online since:

September 1994

Authors:

M. Fahoume, M. El Khamlichi, C. Baltzinger, C. Burggraf

Keywords:

Preferential Sputtering, Surface Segregation, Thin Film, TiAl

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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