Structure of Zr-Y-O Layer in Zr Y O / Si Al N-Based Multilayer Coatings

Marina Fedorischeva; Viktor Sergeev; Mark P. Kalashnikov; Andrew Voronov; Natal'ya Popova

doi:10.4028/www.scientific.net/AMR.1013.200

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1013Structure of Zr-Y-O Layer in Zr Y O / Si Al...

Structure of Zr-Y-O Layer in Zr Y O / Si Al N-Based Multilayer Coatings

Abstract:

TEM research of the structure of multilayered coatings consisting of alternating layers Si-Al-N and Zr-Y-O of equal thickness was carried out. It was shown that boundaries between different layers were the sharp enough, and the chemical composition in each layer was homogeneous. The phase composition of the layers on the basis of Zr-Y-O contained basically nanocrystalline ZrO₂ and the layers on the basis of Si-Al-N, contained partially amorphous, and partially nanocrystalline Si₃N₄.

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Periodical:

Advanced Materials Research (Volume 1013)

Pages:

200-204

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1013.200

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Online since:

October 2014

Authors:

Marina Fedorischeva*, Viktor Sergeev, Mark P. Kalashnikov, Andrew Voronov, Natal'ya Popova

Keywords:

Curvature-Torsion, Grain Size, Magnetron Deposition, Microstructure, Multilayer Heat-Shielding Coatings, Phase Composition

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