An Ultrasonic Non-Contact Handling Device from Quartz Glass for Middle and High Temperature Applications

Abstract:

Ultrasonic non-contact handling is used to manipulate surface sensitive and fragile workpieces, e.g. wafers and glass plates, without mechanical contact. While the technology is available forapplications at room temperature, some of the manufacturing processes of products mentioned aboverequire handling at elevated temperatures. To enable this technology for handling in thermal processesan ultrasonic system for increased working temperatures is required. In order to adapt the ultrasonicsystem to the limited working temperature of the actuator, the handling system has to be operated attwo different temperatures. Due to the small change of the Young's modulus over temperature, quartzglass was chosen as material for the components in the high temperature region. The paper presentsthe design and manufacturing of a novel ultrasonic system operated at 790 °C while the actuator iskept at room temperature.

• Periodical: Advanced Materials Research (Volume 1018)
• Pages: 31-38
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1018.31
• Online since: September 2014
• Authors: Edgars Locmelis*
• Keywords: Handling, Temperature, Ultrasonic

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