Electromechanical Coupling Study on the Pull-in Parameters of Electrostatic Cantilever Microbeam

Abstract:

In this paper, the coupling electromechanical model is proposed for a cantilever microbeam in microelectromechanical system (MEMS). Based on mechanics of plate and theories of electrostatic field, the coupling electromechanical behavior of the cantilever microbeam is investigated. The pull-in voltage is accomplished using the increment-iterative method. The effectiveness of the proposed method is verified by comparing numerical results with that in the literature. The numerical results show that the pull-in voltage decreases with the improvement of the ratio of the width of micro beam to the initial gap between the electrodes.

• Periodical: Advanced Materials Research (Volumes 102-104)
• Pages: 36-40
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.102-104.36
• Online since: March 2010
• Authors: Ye Tao, Sheng Wen
• Keywords: Cantilever Microbeam, Electromechanical Coupling, Pull-In Voltage

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