Electromechanical Coupling Study on the Pull-in Parameters of Electrostatic Cantilever Microbeam

Abstract:

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In this paper, the coupling electromechanical model is proposed for a cantilever microbeam in microelectromechanical system (MEMS). Based on mechanics of plate and theories of electrostatic field, the coupling electromechanical behavior of the cantilever microbeam is investigated. The pull-in voltage is accomplished using the increment-iterative method. The effectiveness of the proposed method is verified by comparing numerical results with that in the literature. The numerical results show that the pull-in voltage decreases with the improvement of the ratio of the width of micro beam to the initial gap between the electrodes.

Info:

Periodical:

Advanced Materials Research (Volumes 102-104)

Edited by:

Guozhong Chai, Congda Lu and Donghui Wen

Pages:

36-40

DOI:

10.4028/www.scientific.net/AMR.102-104.36

Citation:

Y. Tao and S. Wen, "Electromechanical Coupling Study on the Pull-in Parameters of Electrostatic Cantilever Microbeam", Advanced Materials Research, Vols. 102-104, pp. 36-40, 2010

Online since:

March 2010

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Price:

$35.00

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