Electromechanical Coupling Study on the Pull-in Parameters of Electrostatic Cantilever Microbeam
In this paper, the coupling electromechanical model is proposed for a cantilever microbeam in microelectromechanical system (MEMS). Based on mechanics of plate and theories of electrostatic field, the coupling electromechanical behavior of the cantilever microbeam is investigated. The pull-in voltage is accomplished using the increment-iterative method. The effectiveness of the proposed method is verified by comparing numerical results with that in the literature. The numerical results show that the pull-in voltage decreases with the improvement of the ratio of the width of micro beam to the initial gap between the electrodes.
Guozhong Chai, Congda Lu and Donghui Wen
Y. Tao and S. Wen, "Electromechanical Coupling Study on the Pull-in Parameters of Electrostatic Cantilever Microbeam", Advanced Materials Research, Vols. 102-104, pp. 36-40, 2010