Finite Element Analysis and Preliminary Fabrication of Flexible Membrane with Embedded Magnetic Nanoparticles

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In this study, mechanical characteristic of flexible polymer membrane embedded with nanomagnetic particles is analyzed using COMSOL Multiphysics 4.3. The mechanical properties of the membrane is studied by considering the magnetic particles as matrix structures embedded inside the polymer. The target of this work is to realize a new type of magnetic actuator that is able to generate a strong magnetic field and has large mechanical deformation capability as well. On the other hand, the flexible membrane properties should be optically paternable and display very high magnetic sensitivity. Therefore the study is focused not only to analyze the membrane properties but also the technique to fabricate the membrane for MEMS actuator. In this work, the magnetic force acting on the membrane, the length and height of the membrane, and the total volume of Ni particles were set to be constant. A good agreement between simulation and calculation on maximum membrane deformation without particle content was observed. It is shown that by having Ni particles embedded in polymer membrane, the deformation capability was greatly increased up to 30.9 μm. Therefore this study has proven that the smaller size of the magnetic particles with the planar structure arrangement and homogenous distribution of embedded particles can enhance larger membrane deformation. The fabrication concept of the membrane and material synthesis are also introduced. The results obtained in this study will have an important role in the development of electromagnetic actuator for fluids injector integrated in Lab-on-Chip system.

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147-150

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August 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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