Fabrication of Anodic Alumina Templates on Ti/Si Substrate and Preparation of Cu Nanorods by Electrochemical Process

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Abstract: Thin anodic alumina (AAO) templates with uniform nanoscale pore diameters and interpore distances were fabricated by a two-step anodization technique on a Si-based (AAO/Ti/Si structure) under controllable anodizing conditions. The obtained thin AAO templates were approximately 60 nm in pore diameter and 1.2 µm in length with 110 nm interpore distances in area of 1 cm2. A bottom barrier layer of the anodic alumina (AAO) templates was removed by a wet etching using phosphoric acid (5 wt%) under control of etching time. As an application, Cu nanorods arrays embedded in anodic alumina (AAO) template were fabricated by electrodeposition. The morphologies and structure of the templates and the Cu nanorods produced were analyzed using Field-emission scanning electron microscope (FESEM), Energy dispersive x-ray spectroscopy (EDX) and X-ray diffraction (XRD).

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27-30

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August 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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[1] S. Bandyopadhyay, H. Singh Nalwa, eds., Quntum Dots and Nanowires, American Scientific, Stevenson Ranch, (2003).

Google Scholar

[2] I. Lombardi, A.I. Hochbaum, P.D. Yang, C. Carraro, R. Maboudian, Synthesis of high density size-controlled Si nanowire arrays via porous anodic alumina mask, Chem. Mater. 18 (2006) 988.

DOI: 10.1021/cm052435x

Google Scholar

[3] K. Nielsch, F. Müller, A.P. Li, U. Gösele, Uniform nickel deposition into ordered alumina pores by pulsed electrodeposition, Adv. Mater. 12 (2000) 582.

DOI: 10.1002/(sici)1521-4095(200004)12:8<582::aid-adma582>3.0.co;2-3

Google Scholar

[4] S.K. Hwang, J.H. Lee, S.H. Jeong, P.S. Lee, K.H. Lee, Fabrication of carbon nanotube emitters in an anodic aluminum oxide, Nanotech. 16 (2005) 850.

DOI: 10.1088/0957-4484/16/6/040

Google Scholar

[5] D. Crouse, Y.H. Lo, A. Miller, M. Crouse, Self-ordered pore structure of anodized aluminum on silicon and pattern transfer, Appl. Phys. Lett. 76, (2000) 49.

DOI: 10.1063/1.125652

Google Scholar

[6] T.S. Kustandi, W.W. Loh, H. Gao, H.Y. Low, Wafer-scale near-perfect ordered porous alumina on substrates by step and flash imprint lithography, ACS nano. 4, (2010) 2561.

DOI: 10.1021/nn1001744

Google Scholar

[7] J.K. Yeon, W.S. Lim, J.B. Park, N.Y. Kwon, S.I. Kim, K.S. Min, I.S. Chung, Y.W. Kim, G.Y. Yeom, Removal of anodic aluminum oxide barrier layer on silicon substrate by using Cl2/BCl3 neutral beam etching, J. Electochem. Soc. 158 (2011) 254.

DOI: 10.1149/1.3561421

Google Scholar

[8] O. Rabin, P.R. Herz, Y.M. Lin, A.I. Akinwanda, B.S. Cronin, M.S. Dresselhaus, Formation of thick porous anodic alumina films and nanowire arrays on silicon wafers and glass, Adv. Funct. Mater. 13(2003) 8.

DOI: 10.1002/adfm.200304394

Google Scholar

[9] M. Tian, S. Xu, J. Wang, N. Kumar, E. Wertz, Q. Li, P.M. Campbell, M.H.W. Chan, T.E. Mallouk, Penetrating the oxide barrier in situ and separating free standing porous anodic alumina films in one step, Nano Lett. 5 (2005) 4.

DOI: 10.1021/nl0501112

Google Scholar

[10] M. Shaban, H. Hamdy, F. Shahin, J. Park, S.W. Ryu, Uniform and reproducible barrier layer removal of porous anodic alumina membrane, J. Nano Sci. Nanotechnol. 10 (2010) 3380.

DOI: 10.1166/jnn.2010.2259

Google Scholar

[11] H. Masuda, K. Fukuda, Ordered metal nanohole arrays made by a two step, Science 268(1995) 1466.

DOI: 10.1126/science.268.5216.1466

Google Scholar

[12] J. P. Zhang, J. K. Kielbasa, D.L. Carroll, Controllable fabrication of porous alumina templates for nanostructures synthesis, J. Mater. Res. 122 (2010) 295.

DOI: 10.1016/j.matchemphys.2010.02.023

Google Scholar