Micro-Nano Burr Removing Mechanism of Precision Ceramics Surface

Jin Xue Xue; Guo Hu Wang; Guo Fu Gao

doi:10.4028/www.scientific.net/AMR.1027.187

Paper Titles

Analysis on the Influence of Oxidant in CMP of Ultra-Thin Stainless Steel
p.167

Comparison of Fe Catalyst Species in Chemical Mechanical Polishing Based on Fenton Reaction for SiC Wafer
p.171

Introduction of Premixed Micro-Abrasive Water Jet Technology for Deburring
p.177

Analysis of the Main Factors Affecting the Surface Morphology of FSJ Joint
p.183

Micro-Nano Burr Removing Mechanism of Precision Ceramics Surface
p.187

Review of Iridium Oxide Surface Modification on Bio-Electrodes
p.191

Simulation of Temperature Distribution in HFCVD Diamond Films Growth on the End Surfaces of Seals
p.195

The Optimization of Termination in Combined Technique of Magnetorheological Finishing and HF Etching for Laser-Induced Damage Threshold High-Efficiency Improving of Fused Silica
p.199

The Research of Extruded Pressure Auto-Adjustment Method in Abrasive Flow Polishing
p.203

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Micro-Nano Burr Removing Mechanism of Precision Ceramics Surface

Abstract:

The micro and nano burr removing mechanism of precision surface of the nano-ZrO2 ceramics were investigated. The ultrasonic vibration finishing experiments showed that the critical ductility finishing depth of the ceramics was 3μm by conventional finishing, but the increment of the critical ductility finishing depth was 50 percent by ultrasonic finishing. The critical ductility finishing depth increased to 6μm. Analyzed by means of SEM, it was transgranular cracking during the micro-nano burr removing process. The nano-ZrO2 ceramics have high toughness so the critical ductility finishing depth increased. The shape, length, width and thickness of the finishing differed greatly from that obtained by conventional finishing.