Preparation and Characterization of Boron Carbon Nitride Films on High Speed Steel Surface

Kai Bi; Jun Liu; Qi Xun Dai

doi:10.4028/www.scientific.net/AMR.1046.26

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1046Preparation and Characterization of Boron Carbon...

Preparation and Characterization of Boron Carbon Nitride Films on High Speed Steel Surface

Abstract:

In this paper, we deposited BCN films on high speed steel (HSS) substrate by magnetron sputtering. The structure and composition of the films were analyzed by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR). The tribological properties of the films was studied by ball-on-disc tribological test. Results show that BCN films have a certain antifriction effect, which is influenced by RF target power and substrate bias.

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Periodical:

Advanced Materials Research (Volume 1046)

Pages:

26-29

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1046.26

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Online since:

October 2014

Authors:

Kai Bi*, Jun Liu, Qi Xun Dai

Keywords:

Boron Carbon Nitride (BCN) Films, FTIR, High Speed Steel (HSS), Magnetron Sputtering, Tribological Test

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