Influence of Electrochemical Etching Parameters on Morphology of Porous Silicon

Abstract:

In order to protect porous silicon from break and enhance it’s porosity and specific surface area, porous silicon is prepared with electrochemical etching method. The charateristic of porous silicon is investigated with SEM and high-speed adsorption surface area and porosity analyzer. The results show that the porous silicon prepared with the method of gradient etching and control of etching time is mechanically stable. The porosity and specfic surface area are improved.

• Periodical: Advanced Materials Research (Volume 1055)
• Pages: 68-72
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1055.68
• Online since: November 2014
• Authors: Liu Lan, Xue Yan, Xiao Ming Ren, Rui Zhen Xie
• Keywords: Electrochemical Etching Method, Gradient Etching, Porous Silicon

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