Digital Controlled High Power Mid-Frequency Pulsed Power Supply

Qiu Nan; Fan Yin Hai

doi:10.4028/www.scientific.net/AMR.108-111.1332

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 108-111Digital Controlled High Power Mid-Frequency Pulsed...

Digital Controlled High Power Mid-Frequency Pulsed Power Supply

Abstract:

In this article a novel scheme of high power mid-frequency pulse power supply is proposed. The supply is made up of two major stages. First stage is dual interleaved buck chopper stage in order to make the DC bus and output pulse voltage controllable. Second stage is a inverter converting the DC voltage into a series of square AC voltage pulse. IGBT module(300A-1200V) is used as the main switch device for the proposed supply is a high power application. As we know large capacity power IGBT module can hardly work as high as 40Khz[1], so to solve this problem, interleaved control scheme is incorporated. Basic ideas are to share the total switching losses. To combine several converters working under certain sequence is the key point. Final output pulse frequency is 20-40Khz,voltage level is 0-800V, and pulse width is 0-90% changeable. The whole system is concise effective. Experimental results verified the feasibility of abovementioned power supply.

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Periodical:

Advanced Materials Research (Volumes 108-111)

Pages:

1332-1337

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.108-111.1332

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Online since:

May 2010

Authors:

Qiu Nan, Fan Yin Hai

Keywords:

3-Level Converter, Interleaved Buck Converter, Magnetron Sputtering, Mid-Frequency, Pulse Power Supply

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