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An Automatic Equipment for Measure of Electrical Characteristics of Nanoelectronic Devices
Abstract:
An automatic equipment for measurement of voltage-current characteristic of semiconductor devices was described. The technique for precision voltage setting, which enables to obtain ±1mV accuracy in ±10V range, was described. Logarithmic current sensors were used for measurements of the current and calibration technique of the sensors was presented. It provides relative accuracy 1% in wide current range (0,1nA..10mA).
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211-216
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Online since:
January 2015
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© 2015 Trans Tech Publications Ltd. All Rights Reserved
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