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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 11-12Continuous Path Tracking System of High Precision...

Continuous Path Tracking System of High Precision Stage Using Synchronous Piezoelectric Device Driver

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AICAM 2005

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Periodical:

Advanced Materials Research (Volumes 11-12)

Pages:

121-124

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.11-12.121

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Online since:

February 2006

Authors:

T.N. Minh, Kiyoshi Ohishi, Masasuke Takata, Seiji Hashimoto, K. Kosaka, Hiroshi Kubota, Tadahiro Ohmi

Keywords:

Continuous Path Tracking System, High Precision Stage, Nanometer Range Positioning, Synchronous Piezoelectric Device Driver

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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[1] K. Uchino, Smart Mater. Struct. 7 (1998), p.273.

[2] S. Hashimoto, K. Ohishi, T. Ohishi, T. Ishikawa, K. Kosaka, Y. Egashira, H. Kubota and T. Ohmi: IEEE Trans. Mechatronics Vol. 7 (2003), p.1331.

[3] L. Ljung: System Identification - Theory for the User, 2nd ed. (Prentice-Hall, 1999). Fig. 7. Ramp input tracking performance of C(z) and FC. Fig. 8. Step input tracking performance of C(z) and FC. Fig. 9. Sinus input tracking performance of C(z), FC, and CPTS.

[4] T. Miyazaki and K. Ohishi: IEEE/ASME Trans. Mechatronics Vol. 7 (2002), p.235.

[5] S. Manabe: 14th IFAC Symp. on Automatic Control in Aerospace (1998), Korea.

[6] K. Ohishi, M. Fujita and M. Miyazaki: IEEJ Vol. 10 (1992), p.796.