Optimization of Linear Oxide Width Using Local Anodic Oxidation Lithography for Fabrication of Semiconductor and Metal Nanowires

Abstract:

In this study, the response surface methodology was utilized to optimize width of linear oxide for fabrication of Si oxide nanowires using local anodic oxidation lithography. A collection of experiments was designed using central composite design to evaluate the results statistically. The functional relationships were studied between the ambient humidity, applied voltage and tip speed as independent variables. Furthermore, a new approach was indicated by using design of experiment (DOE) to determine the significant parameters that affects on dimensional characteristics of the linear oxide. Numerical optimization was prepared by the DOE software to obtain the optimal conditions of parameters in order to perform the requirements as desired. These results indicate that the technique has a great potential for the fabrication of individual metal and semiconductor nanowires.

• Periodical: Advanced Materials Research (Volume 1109)
• Pages: 500-504
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1109.500
• Online since: June 2015
• Authors: J. Rouhi*, Kevin Alvin Eswar, Mohd Husairi Fadzilah Suhaimi, Salman A.H. Alrokayan, Haseeb A. Khan, M. Rusop
• Keywords: Design of Experiment, Local Anodic Oxidation Lithography, Response Surface Methodology, Si Oxide Nanowires

References

[1] J. Rouhi, S.D. Hutagalung, S. Kakooei, S. Mahmud, Fabrication of nanogap electrodes via nano-oxidation mask by scanning probe microscopy nanolithography, Journal of Micro/Nanolithography, MEMS, and MOEMS, 10 (2011) 043002-043003.

DOI: 10.1117/1.3643480

[2] J. Rouhi, M.R. Mahmood, S. Mahmud, R. Dalvand, The effect of emitter geometry on lateral field emission diodes fabricated by AFM-based electrochemical nanolithography, Journal of Solid State Electrochemistry, 18 (2014) 1695-1700.

DOI: 10.1007/s10008-014-2403-5

[3] J. Rouhi, S. Mahmud, S. Hutagalung, N. Naderi, Field emission in lateral silicon diode fabricated by atomic force microscopy lithography, Electronics letters, 48 (2012) 712-714.

DOI: 10.1049/el.2012.1020

[4] N. -H. Kim, M. -H. Choi, S. -Y. Kim, E. -G. Chang, Design of experiment (DOE) method considering interaction effect of process parameters for optimization of copper chemical mechanical polishing (CMP) process, Microelectronic Engineering, 83 (2006).

DOI: 10.1016/j.mee.2005.11.016

[5] A.I. Khuri, S. Mukhopadhyay, Response surface methodology, Wiley Interdisciplinary Reviews: Computational Statistics, 2 (2010) 128-149.

DOI: 10.1002/wics.73

[6] K. Eswar, J. Rouhi, F. Husairi, R. Dalvand, S.A. Alrokayan, H.A. Khan, M. Rusop Mahmood, S. Abdullah, Hydrothermal growth of flower-like ZnO nanostructures on porous silicon substrate, Journal of Molecular Structure, (2014).

DOI: 10.1016/j.molstruc.2014.05.067

[7] J. Rouhi, S. Mahmud, N. Naderi, C.R. Ooi, M.R. Mahmood, Physical properties of fish gelatin-based bio-nanocomposite films incorporated with ZnO nanorods, Nanoscale research letters, 8 (2013) 1-6.

DOI: 10.1186/1556-276x-8-364

[8] K. Eswar, J. Rouhi, H. Husairi, M. Rusop, S. Abdullah, Annealing heat treatment of ZnO nanoparticles grown on porous Si substrate using spin-coating method, Advances in Materials Science and Engineering, 2014 (2014) 6.

DOI: 10.1155/2014/796759

[9] M. Husairi, J. Rouhi, K. Alvin, Z. Atikah, M. Rusop, S. Abdullah, Developing high-sensitivity ethanol liquid sensors based on ZnO/porous Si nanostructure surfaces using an electrochemical impedance technique, Semiconductor Science and Technology, 29 (2014).

DOI: 10.1088/0268-1242/29/7/075015

[10] S. Masubuchi, M. Ono, K. Yoshida, K. Hirakawa, T. Machida, Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope, Applied Physics Letters, 94 (2009) 082107.

DOI: 10.1063/1.3089693

[11] N. Naderi, M. Hashim, J. Rouhi, H. Mahmodi, Enhanced optical and electrical stability of thermally carbonized porous silicon, Materials Science in Semiconductor Processing, 16 (2013) 542-546.

DOI: 10.1016/j.mssp.2012.09.010

[12] J. Rouhi, M. Alimanesh, S. Mahmud, R.A. Dalvand, C.H.R. Ooi, M. Rusop, Optical properties of well-aligned ZnO nanostructure arrays synthesized by an electric field-assisted aqueous solution method, Ceramics International, 40 (2014) 11193–11198.

DOI: 10.1016/j.ceramint.2014.03.157

[13] J. Rouhi, S. Mahmud, S.D. Hutagalung, S. Kakooei, Optimisation of nanooxide mask fabricated by atomic force microscopy nanolithography: a response surface methodology application, Micro & Nano Letters, IET, 7 (2012) 325-328.

DOI: 10.1049/mnl.2011.0658