Optimization of Linear Oxide Width Using Local Anodic Oxidation Lithography for Fabrication of Semiconductor and Metal Nanowires

Rouhi, J.; Eswar, Kevin Alvin; Husairi, F.S.; Alrokayan, Salman A.H.; Khan, Haseeb A.; Rusop, M.

doi:10.4028/www.scientific.net/AMR.1109.500

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Home Advanced Materials Research Nanoscience, Nanotechnology, and Nanoengineering:...Optimization of Linear Oxide Width Using Local...

Optimization of Linear Oxide Width Using Local Anodic Oxidation Lithography for Fabrication of Semiconductor and Metal Nanowires

Abstract:

In this study, the response surface methodology was utilized to optimize width of linear oxide for fabrication of Si oxide nanowires using local anodic oxidation lithography. A collection of experiments was designed using central composite design to evaluate the results statistically. The functional relationships were studied between the ambient humidity, applied voltage and tip speed as independent variables. Furthermore, a new approach was indicated by using design of experiment (DOE) to determine the significant parameters that affects on dimensional characteristics of the linear oxide. Numerical optimization was prepared by the DOE software to obtain the optimal conditions of parameters in order to perform the requirements as desired. These results indicate that the technique has a great potential for the fabrication of individual metal and semiconductor nanowires.

Info:

Periodical:

Advanced Materials Research (Volume 1109)

Main Theme:

Nanoscience, Nanotechnology, and Nanoengineering: Fundamentals and Applications

Edited by:

Mohamad Hafiz Mamat, Tetsuo Soga and Mohamad Rusop Mahmood

Pages:

500-504

DOI:

10.4028/www.scientific.net/AMR.1109.500

Citation:

J. Rouhi et al., "Optimization of Linear Oxide Width Using Local Anodic Oxidation Lithography for Fabrication of Semiconductor and Metal Nanowires", Advanced Materials Research, Vol. 1109, pp. 500-504, 2015

Online since:

June 2015

Authors:

J. Rouhi *, Kevin Alvin Eswar, F.S. Husairi, Salman A.H. Alrokayan, Haseeb A. Khan, M. Rusop

Keywords:

Design of Experiment, Local Anodic Oxidation Lithography, Response Surface Methodology, Si Oxide Nanowires

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$38.00

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References

[1] J. Rouhi, S.D. Hutagalung, S. Kakooei, S. Mahmud, Fabrication of nanogap electrodes via nano-oxidation mask by scanning probe microscopy nanolithography, Journal of Micro/Nanolithography, MEMS, and MOEMS, 10 (2011) 043002-043003.

DOI: 10.1117/1.3643480

[2] J. Rouhi, M.R. Mahmood, S. Mahmud, R. Dalvand, The effect of emitter geometry on lateral field emission diodes fabricated by AFM-based electrochemical nanolithography, Journal of Solid State Electrochemistry, 18 (2014) 1695-1700.

DOI: 10.1007/s10008-014-2403-5

[3] J. Rouhi, S. Mahmud, S. Hutagalung, N. Naderi, Field emission in lateral silicon diode fabricated by atomic force microscopy lithography, Electronics letters, 48 (2012) 712-714.

DOI: 10.1049/el.2012.1020

[4] N. -H. Kim, M. -H. Choi, S. -Y. Kim, E. -G. Chang, Design of experiment (DOE) method considering interaction effect of process parameters for optimization of copper chemical mechanical polishing (CMP) process, Microelectronic Engineering, 83 (2006).

DOI: 10.1016/j.mee.2005.11.016

[5] A.I. Khuri, S. Mukhopadhyay, Response surface methodology, Wiley Interdisciplinary Reviews: Computational Statistics, 2 (2010) 128-149.

DOI: 10.1002/wics.73

[6] K. Eswar, J. Rouhi, F. Husairi, R. Dalvand, S.A. Alrokayan, H.A. Khan, M. Rusop Mahmood, S. Abdullah, Hydrothermal growth of flower-like ZnO nanostructures on porous silicon substrate, Journal of Molecular Structure, (2014).

DOI: 10.1016/j.molstruc.2014.05.067

[7] J. Rouhi, S. Mahmud, N. Naderi, C.R. Ooi, M.R. Mahmood, Physical properties of fish gelatin-based bio-nanocomposite films incorporated with ZnO nanorods, Nanoscale research letters, 8 (2013) 1-6.

DOI: 10.1186/1556-276x-8-364

[8] K. Eswar, J. Rouhi, H. Husairi, M. Rusop, S. Abdullah, Annealing heat treatment of ZnO nanoparticles grown on porous Si substrate using spin-coating method, Advances in Materials Science and Engineering, 2014 (2014) 6.

DOI: 10.1155/2014/796759

[9] M. Husairi, J. Rouhi, K. Alvin, Z. Atikah, M. Rusop, S. Abdullah, Developing high-sensitivity ethanol liquid sensors based on ZnO/porous Si nanostructure surfaces using an electrochemical impedance technique, Semiconductor Science and Technology, 29 (2014).

DOI: 10.1088/0268-1242/29/7/075015

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DOI: 10.1049/mnl.2011.0658

Paper TitlePages

Corrosion Resistance of the Ceramic Coating Formed by Micro-Plasma Arc Oxidation on AZ91D Alloy

Authors: Shu Hua Li, Fu Chi Wang

Abstract: The ceramic coating was formed by micro-plasma arc oxidation (MPAO) on AZ91D magnesium alloy. The surface and section morphology of coatings were observed using scanning electron microscopy. The phase composition of coatings was analyzed by X-ray diffraction. The method of salt fog experimental was carried out to proof-test performances of anti-corrosion of material. The results showed that the ceramic coating was composed by loose layer and compact layer. The coating surface has a large number of grains with various sizes. In addition, there is also a lot of pore in the loose layer, but the compact layer is tighter than the loose layer. Compact layer has a good combination with substrate magnesium alloy. The MPAO coating is mainly composed of silica oxide (MgAl2Si3O12 and β-Mg2SiO4 and (Mg4Al14) (Al4Si2)O20) and composite oxide of Mg and Al (δ-MgAl28O4). The performance of resistant corrosion of AZ91D coved by ceramic coating is higher than AZ91D magnesium alloy. The corrosion ratio of AZ91D alloy coved by ceramic coatings to AZ91D alloy is 1:8.61.

2451

Fundamental Research on Generation of Nanostructure by Means of Local Anodic Oxidation

Authors: Yumetaka Suehisa, Toshiaki Aoki, Jun Shimizu, Li Bo Zhou, Hiroshi Eda

Abstract: A method to easily and economically manufacture more precise patterns compared with usual MEMS technique has been searched for. Under such circumstances, this research aims to clarify the formation of nano-scale protrusion structure produced by local anodic oxidation on Si wafer surface in expectation of the nano/micro mold production for nanoimprint lithography in future. In this report, the influences of contact width and distance between probe tip and Si wafer surface (distance between terminals) on the size and shape of protrusion patterns were examined in order to clarify the fundamental phenomena in local anodic oxidation. A scanning probe microscope equipped with a current measuring unit was utilized in local anodic oxidation experiments. As a result, it was confirmed that the size of generated protrusion structure became larger with increasing the contact width and became smaller with increasing the distance between probe tip and Si wafer surface. These facts will be useful in producing 3-D nanostructures in future.

424

Improvement of Schottky Contact Characteristics by Anodic Oxidation of 4H-SiC

Authors: Masaya Kimura, Masashi Kato, Masaya Ichimura

Abstract: Anodic oxidation was performed to 4H-SiC in order to suppress the negative impacts on the Schottky diode characteristics. The electrochemical deposition of ZnO before and after the oxidation revealed a reduction in the number of areas with low Schottky barrier height. Before and after the oxidation, current-voltage characteristics of Ni Schottky contacts was compared, and it was found out that the characteristics were improved after the oxidation. These results suggest that the anodic oxidation is a promising technique to suppress the negative influence of the crystal defects.

461

The Effect of Multi-Step Anodic Oxidation

Authors: Ying Zhen, Hai Wang, Xiang Rui Jia, Hong Wei Jiang, Jiang Tao Liu

Abstract: The order of nanopores in anodic aluminium oxide (AAO) membrane formed by multi-step anodization in oxalic acid solution under a constant voltage of 40 V was studied. The average pore diameter increases slightly from 70 nm after two-step anodizing to 75 nm by six-step anodizing. The wall between neighboring pores becomes thinner from 40 nm after two-step anodization to 25 nm by six-step anodization. The interpore distance keeps a constant 105 nm. The orderly domain size is limited to micron size and increases for the two-step and three-step anodization, but the average size of the ordered domains remains constant after three-step anodization under the same working voltage. Moreover, surprisingly, “microflower-like” structures are observed over the surface of highly ordered AAO membrane after six-step anodic oxidation. We assume that they generate with the formation of the nanopores in the anodizing process.

585

Influence of Power Supply Frequency on Microstructure and Properties of Micro-Arc Oxidation Coating on Aluminium Alloy

Authors: Shi Gang Xin, Jun Le, Li Xin Song

Abstract: This paper studies the influence of current frequency on the micro-arc oxidation (MAO) process, microstructrue and the properties of the formed alumina coatings. The amount of discharge sparks increases and the spark moves more quickly with increasing the frequency of current pulse. SEM results show that the size of the discharge products decreases. The anodic cell voltage decreases with increasing the frequency of power supply, however, the cathodic cell voltage increases. The thickness and roughness of the coating produced using frequency of power supply 50 Hz are high. Increasing the frequency, the thickness of the coating decreases, but coating surface becomes even, and the coating possesses better corrosion protective property