Metal Nano Particles Formation on Rotating Powder (NPP) Substrate in Physical Vapor Deposition

Abstract:

Nano-sized (2~10 nm) metal particles were formed and accumulated on a rotating powders substrate by conventional physical vapor deposition (PVD) process. Sucrose was selected as a supporter for the nano-particles on powder (NPP) process. Nuclei, which were formed on the substrate from vaporized or sputtered metal atoms at an initial thin film growth, did not grow up to coalescence stage and did not agglomerate each other when the powder in the vessel was continuously circulated during the deposition. Size of the nanoparticles is controlled by the physical parameters such as metal evaporation rate, rotation speed of the powder, selection of the powder in the PVD. Formation mechanism of nano-particles on the carrier powder have been explained in terms of thermodynamics with TEM, SEM, EDX, UV spectroscopy, etc. comparing with conventional thin film growth in PVD.

• Periodical: Advanced Materials Research (Volume 1119)
• Pages: 3-8
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1119.3
• Online since: July 2015
• Authors: Seok Keun Koh*, Charles Lee, Jung Hwan Lee, Byung Kwuan Kang, Hiroyuki Kaji, Motohiko Hayash, Wan Ho Cho
• Keywords: Dispersion, Nanoparticle, Nuclei, Physical Vapor Deposition, Substrate

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