Influence of Endmill Tool Run-Out to Machining Accuracy in Micro-Groove Milling

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Abstract:

Micro-channel chips, which are used in micro total analysis systems, are attracting attention in the medical field. The photolithography technology used in semiconductor manufacturing is generally used to manufacture micro-channel chip dies. However, this technology requires many processes, such as mask fabrication and the application of photoresist to a substrate, as well as expensive clean room facilities. Therefore, this study examines how to form a fine groove by cutting with micro-endmills. This report experimentally examined the cutting performance of the tool run-out. In addition, effects of the tool run-out on the micro-grove milling, such as decrease in the cutting force changing,and the tool wear, were clarified.

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173-177

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January 2016

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© 2016 Trans Tech Publications Ltd. All Rights Reserved

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