Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing
In this study, a method for the fabrication of microstructures on the surface and inside photosensitive glass (Foturan glass) by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). Two examples: (a) a U-shaped microchannel and (b) an arc-type microchannel formed inside glass are presented.
Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso
C.W. Cheng et al., "Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing", Advanced Materials Research, Vols. 126-128, pp. 394-400, 2010