Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing

C.W. Cheng; J.S. Chen; P.X. Lee; C.W. Chien

doi:10.4028/www.scientific.net/AMR.126-128.394

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 126-128Microfabrication of Photosensitive Glass by...

Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing

Abstract:

In this study, a method for the fabrication of microstructures on the surface and inside photosensitive glass (Foturan glass) by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). Two examples: (a) a U-shaped microchannel and (b) an arc-type microchannel formed inside glass are presented.

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Periodical:

Advanced Materials Research (Volumes 126-128)

Pages:

394-400

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.126-128.394

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Online since:

August 2010

Authors:

C.W. Cheng, J.S. Chen, P.X. Lee, C.W. Chien

Keywords:

Femtosecond Laser, Microstructure, Photosensitive Glass

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References

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