Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing

Abstract:

Article Preview

In this study, a method for the fabrication of microstructures on the surface and inside photosensitive glass (Foturan glass) by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). Two examples: (a) a U-shaped microchannel and (b) an arc-type microchannel formed inside glass are presented.

Info:

Periodical:

Advanced Materials Research (Volumes 126-128)

Edited by:

Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso

Pages:

394-400

DOI:

10.4028/www.scientific.net/AMR.126-128.394

Citation:

C.W. Cheng et al., "Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing", Advanced Materials Research, Vols. 126-128, pp. 394-400, 2010

Online since:

August 2010

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.