Repairing Damage on Ground Fused Silica by CO2 Laser Irradiation

Peng Yao; Takuro Abe; Nobuhito Yoshihara; Tian Feng Zhou; Ji Wang Yan; Tsunemoto Kuriyagawa

doi:10.4028/www.scientific.net/AMR.126-128.401

Paper Titles

Fabrication of Micro Shapes by EDM with Micro Electrodes Generated in Turning Operation
p.375

Study on Application of Taguchi Method to Ultrasonic-Aided Spin Welding of Heterogeneous Plastic Materials
p.381

Bending of Pure Titanium Sheet to Curved Surface Shape by Laser Forming Technique
p.388

Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing
p.394

Repairing Damage on Ground Fused Silica by CO₂ Laser Irradiation
p.401

An Investigation of Attachment on Electrode Surface in Dry EDM
p.407

Investigation of Eco-Friendly Fixed-Abrasive Polishing with Compact Robot
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High-Integrity Finishing of 4H-SiC (0001) by Plasma-Assisted Polishing
p.423

A Review on the CMP of SiC and Sapphire Wafers
p.429

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 126-128Repairing Damage on Ground Fused Silica by CO2...

Repairing Damage on Ground Fused Silica by CO₂ Laser Irradiation

Abstract:

Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness.