Wear of Polishing Pad and Pattern Optimization of Fixed Abrasive Pad
The polishing pad plays a significant role in the Chemical Mechanical Polishing (CMP) process and its wear influences the surface accuracy of the polished wafer. A new polishing pad wear model is introduced and the law of pad wear along the pad radius is discussed, thus a new FAP with optimized pattern is designed and prepared in order. The flatness of the wafer lapped with a uniform pattern pad and that with an optimized pattern was compared. Results show that the PV value of the latter is lower that of the former.
Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso
M. Li et al., "Wear of Polishing Pad and Pattern Optimization of Fixed Abrasive Pad", Advanced Materials Research, Vols. 126-128, pp. 82-87, 2010