Micro abrasive water jet (MAWJ) machining is a new promising micro machining technology for brittle material. The rate of material removal is one of the most important parameter for abrasive processes. Predictive mathematical model for the material removal rate is presented for micro channel machining by micro abrasive water jet (MAWJ). A dimensional analysis technique is used to formulate the model. The validity and predictive capability of the models are assessed and verified by an experimental investigation when machining glasses. It shows that the predictions of the models are in good agreement with the experimental data.