Rapid Fabrication of Micro Optical Elements Using DMD-Based Maskless Lithography Technique

Xiao Wei Guo; Qi Ming Dong

doi:10.4028/www.scientific.net/AMR.146-147.143

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 146-147Rapid Fabrication of Micro Optical Elements Using...

Rapid Fabrication of Micro Optical Elements Using DMD-Based Maskless Lithography Technique

Abstract:

A low-cost microfabrication tool based on digital mirror device(DMD) is presented in this paper. The imaging principle of the system is described and the fabrication methods for binary and nonbinary micro optical elements(MOE) are also discussed in detail. It is expected to provide an understanding of MOEs fabrication using DMD-based maskless lithography technique.

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Advanced Materials Research (Volumes 146-147)

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143-146

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.146-147.143

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Online since:

October 2010

Authors:

Xiao Wei Guo, Qi Ming Dong

Keywords:

DMD, Maskless Lithography, Micro Optical Elements

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