Rapid Fabrication of Micro Optical Elements Using DMD-Based Maskless Lithography Technique

Abstract:

Article Preview

A low-cost microfabrication tool based on digital mirror device(DMD) is presented in this paper. The imaging principle of the system is described and the fabrication methods for binary and nonbinary micro optical elements(MOE) are also discussed in detail. It is expected to provide an understanding of MOEs fabrication using DMD-based maskless lithography technique.

Info:

Periodical:

Advanced Materials Research (Volumes 146-147)

Edited by:

Sihai Jiao, Zhengyi Jiang and Jinglong Bu

Pages:

143-146

DOI:

10.4028/www.scientific.net/AMR.146-147.143

Citation:

X. W. Guo and Q. M. Dong, "Rapid Fabrication of Micro Optical Elements Using DMD-Based Maskless Lithography Technique", Advanced Materials Research, Vols. 146-147, pp. 143-146, 2011

Online since:

October 2010

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.