Quantitative Evaluation on Influence Factors of IC Chip's Image Characteristics Based on Fuzzy Gray Theory

Abstract:

For the purpose of acquiring IC micro-topography accurately, fuzzy gray theory is used for quantitative evaluating the influence factors of IC chip’s image characteristics. Through selecting different influence factors in the process of image acquiring and establishing the factor-parameters array, a mathematical model of fuzzy gray evaluating system is structured. After calculating the fuzzy gray relational degree between the factor-parameters and the image characteristics, the external influence on image is quantized. By experiment and comparison the relational degree is quantitative analyzed and the influence tendency is chart-illustrated, thus research conclusions and referential suggestions are reached. It provides theoretical foundation and technical preparation for IC image sampling condition’s selection and adjustment.

• Periodical: Advanced Materials Research (Volumes 148-149)
• Pages: 280-284
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.148-149.280
• Online since: October 2010
• Authors: Zhong Wei Liang, Chun Liang Zhang, Yi Jun Wang, Hong Guang Deng
• Keywords: Fuzzy Gray Theory, IC Chip Image, Influence Factor, Quantitative Evaluation

References

[1] S.L. ZHU, Taleb-Ahmed A. Pattern Recognition Letters, Vol. 27 (2006) No. 16: p.1893-(1904).

[2] LIAO S.Z. J. of Image and Graphics, Vol. 24 (2006). No. 7: pp.593-596.

[3] LI G. P, etal. Image and Vision Compu. Vol. 3 (2007) No. 1: pp.11-17 Z.

[4] LI De-hua, etal. Computer and Digital Engineering. Vol. 23 (2004) No. 6: pp.37-40 (in Chinese).

[5] ZHU Hong-de, LOU Xiao-ping, DENG Wen-yi, LV Nai-guang. Computer Eng. and Appl., Vol. 11 23 (2006) No. 3: pp.217-218.

[6] WANG Yue-zong, etal. Computer Engineering and Applications, Vol. 25 (2003) No. 9: pp.98-100.

[7] Zhu H. Foundation of Digital Image Processing [M]. ( Press of Science. China, 2005).

[8] Zheng N N. Computer Vision and Pattern Recognition [M]. ( Press of National Defense Industry. China, 2005) (in Chinese).

[9] Jia Y D. Machine Vision [M]. ( Press of Science. China 2006).

[10] Cheng Z X. Wavelet Analyze Algorithm and Application [M]. (Press of Xi'an Jiaotong University. China 2005).

[11] H Zhu, J Zhou, H Li. SPIE. 2007. 4875: pp.651-655.

[12] Zhao Z Q, Xiong Y J. Computer of Industry Controlling. Vol. 18. 2005, No. 10: pp.1-2.

[13] Yuan H. Journal of S.C.U. T, Vol. 30. 2002. No. 4: pp.60-64.

[14] Zheng Lian. Journal of Beijing Institute of Technology, Vol. 17. 1997, No. 8: pp.193-198.

[15] Shi Min, Xie Sheng-li. Journal of S.C.U. T, Vol. 34. 2006, No. 1: pp.18-23.