Investigation on Micro Defects of the Protective Coating SiOx in Mass Manufacturing Processes
A transparent hard coating of silicon oxide (SiOx) deposited by using plasma enhanced chemical vapour deposition (PECVD) can protect the surfaces of plastics and metals. This coating has good adhesion, good wear-resistance and environmental resistance. Our work is to optimize this protective organosilicon film in an industry manufacturing process for the metal cover of mobile phones and plastic lenses. Investigation of the failures of the film and analysis of the defect in deposited films by means of the optical microscope and atomic force microscope (AFM) shows that mechanism of the micro defect with Newton color rings.
Xianghua Liu, Zhengyi Jiang and Jingtao Han
R. Wang et al., "Investigation on Micro Defects of the Protective Coating SiOx in Mass Manufacturing Processes", Advanced Materials Research, Vols. 148-149, pp. 443-448, 2011