The surface topography of Titanium implants modulates bone response and implant anchorage. For this reason great efforts yet will be made for new surface refinements. In this work Ti samples were surface structured by corundum blasting firstly and then chemically etched to remove the remaining corundum particles and further surface structuring. In following steps these samples were electrochemically etched or additionally structured and coated with various micro-plasma processes. As result we got various typical surface structures in micro- and nanoscale and also different coating layers in dependence on the composition of the electrolyte for the micro-plasma process. In all steps the properties of the modified Ti surfaces were characterised mechanically by surface profiling, optically by SEM and electrochemically by CV- (for testing the corrosion parameters), CA- (to give the enlargement of the real surface) and EIS-measurement in range of 100 kHz to 1 mHz (to give a survey of the changing of surface capacities and structures). A comparison of the measuring results demonstrated their reliability.