Structure and Mechanical Properties of (Cu, Ti) - Binary Metal Doped Diamond-Like Carbon Films

Abstract:

The composite DLC films doped with different content of Cu, Ti unitary and binary metal have been deposited on stainless steel and silicon substrate using DC-magnetic separation and pulse cathode double-excitation source plasma arc deposition technique. Structural and mechanical properties of the films were investigated by Raman spectroscopy, Atomic Force Microscope, micro-sclerometer and surface profilometer. The results indicated that the hardness and internal stress of Cu-DLC films decrease upon incremental content of copper from 0 to15 at.%. More attractively, a simultaneous improvement of the hardness (31GPa) as well as the release of the internal stress (up to 55%) can be achievable for samples with the relative atomic percentages of Ti and Cu contents of 43.6% and 1.56% respectively.

• Periodical: Advanced Materials Research (Volumes 150-151)
• Pages: 217-222
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.150-151.217
• Online since: October 2010
• Authors: Xiao Hong Jiang, Bing Zhou, D.G. Piliptsou, Alexander V. Rogachev
• Keywords: Deposition, Diamond-Like Carbon (DLC), Mechanical Property, Metal Doped Film, Raman Spectroscopy

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